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Improved light extraction efficiency in III-nitride photonic crystal light-emitting diodes

机译:改善III族氮化物光子晶体发光二极管的光提取效率

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We observed a significant enhancement in light output from GaN-based light-emitting diodes (LEDs) in which two-dimensional photonic crystal (PC) patterns were integrated. We approached two types PC LEDs. One is top loaded PC LEDs. The PC patterns were generated on the top p-GaN layer. The other is bottom loaded PC LEDs. In this LEDs, PC patterns were integrated on the sapphire substrate. Two dimensional square-lattice air-hole array patterns, whose period was varied between 300 and 700nm, were generated by laser holography. Unlike the commonly utilized electron-beam lithographic technique, the holographic method can make patterns over a large area with high throughput. The resultant PC-LED devices with a pattern period of ~500nm had more than double the output power. The experimental observations are qualitatively consistent with three-dimensional finite-difference-time-domain simulation results.
机译:我们观察到从GaN的发光二极管(LED)的光输出的显着增强,其中一体化了二维光子晶体(PC)图案。我们接近两种类型的PC LED。一个是装载PC LED。在顶部P-GaN层上产生PC模式。另一个是底部装载的PC LED。在该LED中,PC图案集成在蓝宝石衬底上。通过激光全息术产生二维正方形晶格空气孔阵列图案,其周期在300和700nm之间产生。与常用的电子束光刻技术不同,全息方法可以在具有高吞吐量的大面积上进行图案。具有〜500nm的图案周期的得到的PC-LED器件具有多于加倍的输出功率。实验观察与三维有限差分时间域模拟结果定性一致。

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