DRAWING SHIFT MEASURING METHOD, EXPOSURE METHOD, GRADUATED PATTERN, GRADUATED PATTERN DRAWING METHOD, AND GRADUATED PATTERN DRAWING DEVICE

摘要

PROBLEM TO BE SOLVED: To measure an amount of drawing shift of an image to be drawn by a drawing head in a drawing slippage measuring method with higher accuracy.;SOLUTION: In the drawing shift measuring method, each of different graduated patterns U1, U2 is drawn on a recording medium 1 by each of the drawing heads 10a-10d so that each of the graduated patterns U1, U2 having predetermined different pitches is drawn on one recording medium 1 in parallel by the different exposure heads 10a-10d and the amount of drawing shift is measured by comparing the graduated patterns U1, U2 drawn on the recording medium 1 with each other.;COPYRIGHT: (C)2007,JPO&INPIT