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Design of low-noise CMOS transimpedance amplifier

机译:低噪声CMOS跨阻放大器的设计

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Purpose - The purpose of this paper is to design a very low-noise transimpedance amplifier (TIA) for a novel multi-pixel CMOS photon detector which performs secondary electron (SE) detection in the scanning electron microscope (SEM). Design/methodology/approach - The TIA, which is implemented with three-stage push-pull inverters, is optimised using a nomograph technique developed in MATLAB. SPICE simulations are conducted to verify the results generated from MATLAB. Important performance figures are obtained experimentally and these measurements are compared with simulation results. Findings - A low-noise TIA fabricated in a standard 0.35μm CMOS technology was tested. Experimental results obtained show that the TIA connected to a photodiode with a junction capacitance of 0.8pF can carry out its task effectively with a transimpedance gain of 126.9dBO, a bandwidth of 9.8MHz, an input-referred noise of 2.50×10-13 A/vHz and an SNR of 12.8. The power consumption of the TIA was 49.3mW. These encouraging results have exhibited the potential of the circuit for use in the CMOS photon detector. Originality/value - This paper presents a low-noise transimpedance amplifier that is highly suitable to be used as a critical constituent block for the CMOS photon detector which aims to take over the role of photomultiplier tube in SE detection in the SEM. Solid-state approaches have recently been reinvigorated for improving certain aspects of SE detection in scanning electron microscopy and this work has supported and contributed to the trend.
机译:目的-本文的目的是设计一种用于新型多像素CMOS光子探测器的超低噪声跨阻放大器(TIA),该探测器在扫描电子显微镜(SEM)中执行二次电子(SE)检测。设计/方法/方法-TIA是由三级推挽逆变器实现的,使用在MATLAB中开发的列线图技术进行了优化。进行SPICE仿真以验证从MATLAB生成的结果。通过实验获得重要的性能数据,并将这些测量结果与仿真结果进行比较。发现-测试了采用标准0.35μmCMOS技术制造的低噪声TIA。获得的实验结果表明,连接到结电容为0.8pF的光电二极管的TIA可以以126.9dBO的跨阻增益,9.8MHz的带宽,2.50×10-13 A的输入参考噪声有效地执行其任务。 / vHz和SNR为12.8。 TIA的功耗为49.3mW。这些令人鼓舞的结果表明了该电路在CMOS光子检测器中使用的潜力。原创性/价值-本文提出了一种低噪声跨阻放大器,该放大器非常适合用作CMOS光子检测器的关键组成部分,旨在取代光电倍增管在SEM SE检测中的作用。固态方法最近被重新振作以改善扫描电子显微镜中SE检测的某些方面,这项工作支持了这一趋势并为之做出了贡献。

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