Improved reflectivity of platinum/carbon multilayers for X-ray mirrors by carbon doping into platinum layer

摘要

We present a study of improving the X-ray reflectivity of platinum/carbon multilayers for X-ray mirrors. The X-ray reflectivity of the multilayers depends entirely on the interface quality. Here we show that carbon doping into the platinum layer limits crystallization during deposition and thus reduces the interface roughness. Platinum/carbon and carbon-doped platinum/carbon multilayers were deposited on a silicon (100) substrate by DC magnetron sputtering. The X-ray reflectivity of the multilayers was measured by grazing incidence X-ray reflectometry with a copper K_(α1) source. We found that the reflectivity increases with the carbon concentration and that an improvement of about 10% in the reflectivity could be expected.