Characterization of optical filters and GaN based Schottky ultraviolet detector in vacuum ultraviolet and soft X-ray region

摘要

The characterization of freestanding thin film filters and GaN based Schottky ultraviolet (UV) detectors were carried out from vacuum ultraviolet (VUV) to soft X-ray (SX) region (25-100 eV, 12.4-50 nm). The high order light from grating of monochrometer was able to be eliminated by using Ti, Ti/Al/Ti and SiN thin films as a filter. Moreover, the transmittance of Schottky electrode Ni/Au calculated from that of Ti/Au membrane was about 50-70% in this wavelength region, and it is enough thin to transmit VUV and SX light. Measured using such a filter and transparent electrode, this detector can also detect VUV and SX light. The responsivity in VUV (30-50 nm) and SX region (@13 nm) was about 0.01 and 0.05 A/W, respectively.