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机译:通过基座辅助微波退火对低能硼注入和磷注入硅进行有效的掺杂活化
School of Matter, Transport, and Energy, Arizona State University, Tempe, Arizona 85287, USA;
CHD-Fab, Freescale Semiconductor Inc., 1300 N. Alma School Rd., Chandler, Arizona 85224, USA;
School of Matter, Transport, and Energy, Arizona State University, Tempe, Arizona 85287, USA Lam Research Co., 4650 Cushing Pkwy, Fremont, California 94538, USA;
Department of Electrical Engineering, University of California, San Diego, California 92093, USA;
Department of Electrical Engineering, University of California, San Diego, California 92093, USA;
Department of Mathematics, Norfolk State University, Norfolk, Virginia 23504, USA;
School of Matter, Transport, and Energy, Arizona State University, Tempe, Arizona 85287, USA;
机译:通过基座辅助微波退火对低能硼注入和磷注入硅进行有效的掺杂活化
机译:感受器辅助低温微波退火在砷注入硅中的掺杂活化
机译:通过离子注入硅的低温微波退火有效激活掺杂剂
机译:使用和不使用预非晶化注入的激光退火激活锗中的硼和磷掺杂剂
机译:微波退火对低能离子注入晶圆的影响。
机译:超低能大剂量硼注入Si(110)的化学状态和原子结构演变
机译:350°C微波退火的超浅结合N-MOS的研究锗磷掺杂剂活化