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Influence of Overheating Effect on Transport Properties of AlGaN/GaN Heterostructures

机译:过热影响对AlGaN / GaN异质结构运输性能的影响

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We report on peculiarities observed in electrical characteristics of AlGaN/GaN transmission line model (TLM) devices. Special attention is given to self-heating processes and thermal effects in Al{sub}xGa{sub}(1-x)N/GaN based devices. The set of the samples under test contains conventional Al{sub}33Ga{sub}67N/GaN heterostructure with 1μm thick buffer on a sapphire substrate and wafers which differ from the conventional one by a layer (SiC substrate, additional AlN spacer, Al mole fraction of the barrier). The Al{sub}30Ga{sub}70N/GaN structures with 3μm buffer grown on thin (450μm) and thick (3mm) sapphire substrate investigated as well. Comprehensive analysis of the experimental data (current-voltage characteristics, noise figures) combined with the simulation of the thermal budget of the devices reveals strong dependence of device performance and overheating not only on substrate type but also on buffer thickness as well as Al mole fraction of barrier layer. Regarding this the optimal conditions for observation of hot-electron effects can be determined. The obtained results can be used as guidelines in optimization of wafer and device design in order to reach the best performance frequently predicted for nitride based structures.
机译:我们报告了AlGaN / GaN输电线路模型(TLM)器件的电气特性观察到的特点。基于Al {Sub} XGA {Sub}(1-x)N / GaN的设备中的自热进程和热效果特别注意。被测样品的组样品含有常规的Al {Sub} 33Ga {亚} 67N / GaN异质结构,其在蓝宝石衬底和晶片上具有1μm厚的缓冲液,其与常规接一个通过层(SiC衬底,额外的Aln Spacer,Al Mole不同屏障的一部分)。在薄(450μm)和厚(3mm)蓝宝石衬底上生长的3μm缓冲液的Al {亚} 30Ga {Sub} 70N / GaN结构。对实验数据(电流 - 电压特性,噪声数字)的综合分析与器件的热预算的模拟结合揭示了器件性能的强大依赖性,而且不仅在基板类型上的过热,而且对缓冲厚度以及Al Mole分数进行过热阻隔层。关于这种观察热电效应的最佳条件可以确定。获得的结果可以用作优化晶片和器件设计的指导原则,以便达到基于氮化物的结构经常预测的最佳性能。

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