WAFER PROCESSING APPARATUS HAVING WAFER MAPPING FUNCTION AND WAFER DETECTION METHOD

摘要

If each stage of the shelf in the wafer pod is mounted every plurality a failure occurs in the respective treatment step. Further, in the device for the detection of the wafer, to a simple structure, air-in some cases to be used a drive means such as a poor stability of the speed of the driven cylinder to perform the movement of the sensor. To move the sensor by such a driving means is performed as a detection error it is difficult to detect the accurate wafer is large. The present invention provides a wafer processing apparatus including a dog and the permeability sensor for detecting the wafer, indicator means, and a dog sensor for transmission. The wafer processing apparatus by calculating the ratio of the duration of the signal from the dog permeability sensor for a response to the duration and the indicator means of the signal from the transmission sensor for wafer detection, by comparing the preset threshold value and the ratio It determines the number of wafers. ; Pod, wafer, transmission, dog