The reactant pulse forming method by manipulating the gas supply system, the valve assembly and valve assembly,

摘要

PROBLEM TO BE SOLVED: To provide a gas supply system which can block reactants without influences of a dead space and tolerates lowering of sealing between a valve member and a valve seat without lowering the separation of pulses, while can be operated so as to output suitably separated pulses of the reactants.;SOLUTION: The gas supply system comprises a first valve 10 which is a 4-port diaphragm valve, and a second valve (not shown) which is arranged so that it allows a first port 30 to communicate with a discharge portion through fluid with the first valve 10 being open and that the fluid communication is stopped with the first valve 10 being closed. In a state where the reactants are flowed, the first valve 10 is open while the second valve is closed, and in a purged state, the first valve 10 is closed while the second valve is open.;COPYRIGHT: (C)2005,JPO&NCIPI