Gas supply system, valve assembly and method of forming reactant pulses by operating a valve assembly

摘要

A gas supply system for pulse-wise feeding a reactant gas to a reactor, the gas supply system comprising:a first valve (300) being a four-port diaphragm valve;a second valve (500) which in an open state brings the first port (30) into fluid communication with an exhaust and in a closed state closes off said fluid communication; wherein the gas supply system provides a reactant flow state in which the first valve (300) is in an open state and the second valve (500) is in a closed state, and wherein the gas supply system provides a purge state in which the first valve (300) is closed and the second valve (500) is in an open state. Also disclosed are a method of switching a process fluid by operating a gas supply system according to the invention and a valve assembly for use in such a gas supply system.