Gas supply system, valve assembly and method of forming reactant pulses by operating a valve assembly

摘要

A gas supply system for pulse-wise feeding a reactant gas to a reactor, the gas supply system comprising: ;a first valve being a four-port diaphragm valve; ;a second valve which in an open state brings the first port into fluid communication with an exhaust and in a closed state closes off said fluid communication; ;wherein the gas supply system provides a reactant flow state in which the first valve is in an open state and the second valve is in a closed state, and wherein the gas supply system provides a purge state in which the first valve is closed and the second valve is in a open state. Also disclosed are a method of switching a process fluid by operating a gas supply system according to the invention and a valve assembly for use in such a gas supply system.