公开/公告号EP1944083A4
专利类型
公开/公告日2012-05-16
原文格式PDF
申请/专利权人 JAPAN SCIENCE AND TECHNOLOGY AGENCY;TOKYO UNIVERSITY OF SCIENCE EDUCATIONAL FOUNDATION ADMINISTRATIVE ORGANIZATION;
申请/专利号EP20060797556
申请日2006-09-06
分类号B01J27/24;B01J35/02;C01B21/06;C30B29/38;H01L21/20;H01L21/205;H01L21/28;
国家 EP
入库时间 2022-08-21 17:17:10