PROBLEM TO BE SOLVED: To speedily and appropriately determine the category of a defective image utilized for teacher data when creating the teacher data used for learning of a sorter for sorting defects on a substrate.;SOLUTION: One kind of feature amount Ux is acquired from a target defective image 7 having an undetermined category, and one kind of feature amount, namely Tx11, Tx12, Tx21, is acquired from typical images 811, 812, 821 indicating typical defects of two categories 81, 82. Then, three feature amount differences between the feature amount Ux and the feature amount Tx11, Tx12, Tx21 is obtained, and one vote is casted for the category 81 to which the typical image 811 having the smallest feature amount difference belongs. The similar processing is performed to the remaining types of feature amount, and the category 81 having the largest number of votes obtained in the categories 81, 82 is determined to be a category to which the target defective image 7 belongs. In this manner, by casting votes by obtaining the feature amount difference for each type of feature amount, the category of the target defective image is determined speedily and appropriately.;COPYRIGHT: (C)2010,JPO&INPIT
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