A method for producing a zinc oxide (ZnO) based single crystal, a ZnO based thin film and a ZnO based single crystalline thin film, and a ZnO based single crystal thin film and a ZnO based material comprising the ZnO based single crystalline thin film

摘要

PROBLEM TO BE SOLVED: To provide: (1) a method for controlling a shape of a zinc oxide (ZnO)-based single crystal nanostructure;(2) a method for producing a highly oriented ZnO-based single crystal nanostructure, derived from the shape control technique; and (3) a technique for producing a ZnO-based thin film and ZnO-based single crystal thin film using the techniques.SOLUTION: A method for producing a zinc oxide (ZnO)-based single crystal nanostructure includes: a step of forming a zinc oxide (ZnO)-based thin film on a substrate; a step of subjecting the ZnO-based thin film to heat treatment in a reduced atmosphere; and a shape control step for a ZnO-based single crystal nanostructure obtained through the heat treatment step. The shape control step includes: a reheat treatment step including a step of further subjecting the ZnO-based single crystal nanostructure obtained through the heat treatment step to heat treatment in an atmosphere or a temperature condition different from those in the heat treatment; and/or a step of allowing the ZnO-based single crystal nanostructure obtained through the heat treatment step to be regrown, using a chemical vapor deposition method.