Design, modeling and FEM-based simulations of a 1-DoF MEMS bulk micromachined piezoresistive accelerometer

摘要

The paper presents the design, mathematical modeling and finite element method-based simulations of a piezoresistive bulk micromachined accelerometer having single degree-of-freedom. Simple analytical expressions to define the function of the designed micro accelerometer along with the considerations for its fabrication imperfections have been discussed. The details of the electromechanical design and simulations of the accelerometer are presented.