A micromachined piezoresistive accelerometer with high sensitivity. design and modelling

摘要

A micromachined piezoresistive accelerometer with high sensitivity and high natural frequency is designed and modelled in this paper. A novel structure design, which can significantly increase the sensor's sensitivity while maintaining a high natural frequency, is presented and optimized. A simplified analytical model is established to describe the accelerometer's mechanical behaviour. Finite element modelling was also conducted to verify the analytical model and evaluate the performance of the micro-accelerometer. Comparison of the results obtained from the analytical model and finite element simulation shows good agreement. From the analysis, the configuration of the accelerometer was optimised. Finally, the merits of this new design over commercial products in sensitivity and natural frequency are presented.