Current Status of RF MEMS Devices for Wireless Communication Systems

摘要

Recently the focus of RF-MEMS research has changed its direction towards system integration, reliability and the development of RF-MEMS devices with novel configurations to meet needs of wireless communication systems. These systems have gained worldwide attention in recent years, particularly due to the proliferation in MEMS technology which has facilitated the development of radio frequency micro-electro-mechanical (RF MEMS) devices with novel configurations. The evolution of RF MEMS devices is needed for the expanding broadband wireless radio communication. Radio frequency, semiconductors technologies and IC-compatible MEMS technologies are improving day by day and have an important role in the fast growing market of wireless communication systems. This paper aims to present the current status of the RF-MEMS devices briefly for the wireless and the satellite communication systems. This paper briefly discusses RF-MEMS Switch, vibrating micromechanical diamond disc resonator, RF-MEMS variable capacitors and MEMS tunable inductor.