THE TIME-RESOLVED TWO-DIMENSIONAL PROFILE OF A RADIOFREQUENCY CAPACITIVELY COUPLED PLASMA

摘要

The temporal characteristics of 2D spatial images of the net excitation rate of argon 3p(5) in a low-pressure capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by computer-assisted optical emission tomography for pressures ranging from 10 mTorr to 1.0 Torr. The radial uniformity and sustaining mechanism of the CCP are discussed on the basis of the absolute net excitation rate of Ar(3p(5)) in Ar for 13.56 MHz. [References: 19]