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In Situ Measurement of Wire-Bond Strain in Electrically Active Power Semiconductors

机译:电有源功率半导体中线键应变的原位测量

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摘要

Thermal–mechanical displacement/strain in power semiconductor devices is investigated using electronic speckle pattern interferometry (ESPI). Validated models for thermal–mechanical strain are key to improving the reliability of power electronics modules. ESPI is a noncontact optical technique capable of providing surface displacement measurements with submicrometer resolution. The significant contribution of this paper is an experimental methodology by which wire-bond displacement/strain can be measured in an active device. Simultaneous in-plane and out-of-plane measurements are combined to accurately measure the displacement field across the wire-bond interface, while decoupling thermal–mechanical deformation not related to wire-bond strain (such as base plate thermal expansion). Experimental results verify the electrical-loss-driven thermal–mechanical displacement/strain in an electrically active discrete insulated gate bipolar transistor switching at 5 kHz.
机译:功率半导体器件中的热机械位移/应变使用电子散斑图干涉仪(ESPI)进行了研究。经过验证的热机械应变模型是提高电力电子模块可靠性的关键。 ESPI是一种非接触式光学技术,能够提供具有亚微米分辨率的表面位移测量。本文的重要贡献是一种实验方法,通过该方法可以测量有源器件中的引线键合位移/应变。同时进行平面内和平面外测量相结合,可以精确地测量引线键合界面上的位移场,同时使与引线键合应变无关的热机械变形(例如底板热膨胀)脱钩。实验结果验证了电损耗驱动的热机械位移/应变在5 kHz开关的电有源分立绝缘栅双极晶体管中的作用。

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