Antireflective Structure Imprinted On The Surface Of Optical Glass By Sic Mold

摘要

An antireflective structure with two-dimensional 300-nm periodicity was fabricated on a phosphate glass surface using an imprinting process with a SiC mold. The optimized structure designed using RCWA calculation was a convex circular cone sharing the ridge line of adjacent cones. The SiC mold was fabricated using electron beam drawing and subsequent reactive ion etching with CHF_3 and O_2 gases. The glass' surface reflectance was estimated as 0.2% at 530 nm wavelength, which was approximately 1/20 that of the optically polished surface.