微机电系统磁场传感器信号处理电路

摘要

介绍了一种微机电系统(Micro-electro-mechanical system,MEMS)磁场传感器微弱信号处理电路的设计,该处理电路是MEMS磁场传感器的重要组成部分,该电路由放大电路和滤波电路构成.对设计的处理电路进行模拟分析和实验测试,处理电路性能良好.外接MEMS磁场传感器后对传感器性能进行测试,传感器的电流-电压特性以及磁场-电压特性符合最初的设计要求,灵敏度可以达到14 mV/mT.实验表明该电路对输出信号进行了放大,并有效地抑制了噪声,且有良好的灵敏度.%A design of a micro-electro-mechanical system (MEMS) weak signal processing circuit of magnetic field sensor is described. The processing circuit is an important part of the magnetic field sensor, including an amplifier circuit and a filter circuit. The performance is good in line with the original design requirements through circuit analysis and experimental testing. The current-voltage characteristics and the magnetic field-voltage characteristics of the sensor are verified by experiment with the sensitivity of 14 mV/mT. The experiments show that the signal is effectively amplified, the noise is suppressed and the circuit has good sensitivity.