MICRO-MAGNETIC FIELD SENSOR, MICRO-MAGNETIC FIELD SENSOR DEVICE AND METHOD

摘要

The invention relates to a micro-magnetic field sensor for detecting three-dimensional magnetic fields. The sensor comprises at least three sensor elements in each case for measuring at least one direction of the magnetic field, wherein at least two sensor elements are arranged in a first plane and wherein at least the third sensor element is arranged in a second plane perpendicular to the first plane, and wherein at least one of the sensor elements is arranged at an acute or obtuse angle with respect to a third plane which is arranged perpendicular to the first and second planes. The invention also relates to a micro-magnetic field sensor device.