Characterization of Pad Materials in Abrasive Profile Polishing

摘要

Polishing experiments with adapted tools have verified the FEM model showing a minimized shape deviation at groove transitions after polishing with higher process forces. Advantage of the model based process design is the minimisation of tool shape iteration cycles and the achievement of deterministic polishing processes. Beside material deformation further influencing factors like tool wear and material inhomogeneity lead to local unintentional material removal during polishing which has to be observed for the process design. By abrasive profile polishing the roughness of micro structured grooves can be improved to optical quality. This polishing process is applicable in optical mould making for quality increase of replicated structured glass lenses.