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Active angular alignment of gauge block in double-ended interferometer for its calibration

机译:用于双端干涉仪的测量块的主动角度对准,校准

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This paper presents a method for active angular alignment of gauge block implemented in a system for automatic contactless calibration of gauge blocks designed at ISI ASCR. The system combines low-coherence interferometry and laser interferometry, where the first identifies the gauge block sides position and the second one measures the gauge block length itself. A crucial part of the system is the algorithm for gauge block alignment to the measuring beam which is able to compensate the gauge block lateral and longitudinal tilt up to 0.141 mrad. The algorithm is also important for the gauge block position monitoring during its length measurement.
机译:本文介绍了一种用于在ISI ASCR设计的规格块的自动非接触式校准系统中实现的量块的主动角度对准方法。该系统结合了低相干干涉测量和激光干涉测量法,其中首先识别规格块侧位置,第二个是测量块长度本身测量。该系统的一个关键部分是用于测量光束的规格块对准的算法,该测量光束能够补偿尺寸块横向和纵向倾斜度高达0.141mrad。该算法对于在其长度测量期间的规格块位置监控也很重要。

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