Uncertainty evaluation for the gauge blocks calibration using the modified DMDM gauge block interferometer

摘要

This paper presents the evaluation of the uncertainty for the length measurement of gauge blocks by optical interferometry. In order to improve the gauge block calibration method and to decrease measurement uncertainty the old Zeiss-Kosters gauge block interferometer has been modified and improved by DMDM (Directorate of Measures and Precious Metals of Serbia). The main modification of the interferometer covers introduction of two laser sources, as new wavelength standards, as well as new hardware system and interferometer software, developed to completely automate the calibration process. The validation of the new measurement procedure details the uncertainty budget. The measurement method and model equation, which serves as the basis for the uncertainty evaluation is described. The uncertainty evaluation is performed in accordance with the document JCGM 100:2008-Evaluation of measurement data Guide to the expression of uncertainty in measurement (GUM).