New Evaluation Technique for Porous Films including Nano-Clustering Silica based on Grazing Incidence Small Angle X-Ray Scattering with Two Component Pore Model

摘要

A new evaluation technique for porous films based on the tilted grazing incidence small angle x-ray scattering measurement with the Gaussian-exponential pore model was developed and successfully demonstrated in the evaluation of the Nano-Clustering Silica (NCS) film of 170 nm thick. The interference effect seen in the lateral direction indicates that the pores in the NCS are aligned parallel to the substrate. The average pore diameter of the NCS was 1.1 nm and the pore sizes are mainly less than 3nm. These physical features of the NCS related to their superior hardness and the low leakage current.