APPARATUS FOR SYNCHROTRON GRAZING INCIDENCE X-RAY SCATTERING

摘要

For easy control of the temperature of a sample as well as for precise control of an incident angle of a synchrotron X-ray beam, the present invention provides an apparatus for synchrotron grazing incidence X-ray scattering including: a sample mounting section where a thin film sample to be analyzed is located and reacted with incident synchrotron X-ray beam to be scattered so as to produce scattering signals; a sample control section controlling both the incident angle of the synchrotron X-ray beam and the position of the sample mounting section with respect to the synchrotron X-ray beam so as to control the scattering from the sample mounting section; a temperature control section controlling rise and drop in temperature of the sample mounting section; and a main control section conveying control commands to both the sample control section and the temperature control section, and restoring and displaying the control commands and results thereof.