53.6: Simulation and Design of the Silicon Drag-Force-Gas Flowsensor Based on Piezoresistive Effect

摘要

A Silicon Drag-Force-Gas Flowsensor Based on Piezore-sistive Effect has been developed for Integration circuits (IC) technology applications. The sensor has been tested at gas flow from 20 to 500 1/h with temperature varying from 18-100 C°. The experimental pattern of silicon gas flowsensor was designed, fabricated and tested. The theoretical analysis and simulation of a flowsensor chip in the airflow was carried out for the investigations of flowsensor behavior and characteristics. The finite element method (FEM) of ANSYS-software has been employed for the complete numerical analysis of this structure.