Fabrication and release of SU-8 structures on soft substrate

摘要

A recent trend in biosensors and biomedical devices is the fabrication of compact, high aspect ratio and free-standing biocompatible structures with application as force sensors, micro-needle-based drug delivery systems, array of chemical sensors, etc. SU-8 photoresist is a promising candidate to fulfill such structure. Poly(Dimethylsiloxane) has been used as the sacrificial layer to successfully release the SU-8 structures without the use of any specialized equipment, like a dicing saw.