Thermal conductivity estimation method, thermal conductivity estimation device, semiconductor crystal product production method, thermal conductivity calculation device, thermal conductivity calculation program, and thermal conductivity calculation method

摘要

A thermal conductivity estimation method includes: measuring a temperature distribution of a measurement sample surface in a stationary state by partially heating the measurement sample under the predetermined heating conditions; Calculating a temperature distribution of a sample model surface by performing a heat transfer simulation on the sample model of the same shape as the measurement sample for plural combinations of preliminary thermal conductivities and heating conditions; Creating a regression model, the input of which is a temperature distribution of the measurement sample surface and the output of which is a thermal conductivity of the measurement sample, by a machine learning technique using training data in the form of a calculation result of the plurality of combinations and the temperature distribution obtained from the plurality of combinations; and estimating the thermal conductivity of the measurement sample by inputting a measurement result of the temperature distribution of the measurement sample surface into the regression model.