BLACKENED FILM FORMING FURNACE FOR SHADOW MASK STRUCTURAL BODY

摘要

PURPOSE:To prevent the corrosion of materials for a chamber and eliminate the production of dust and/or foreign substance due to the corrosion to permit the stabilized use of a furnace for a long period of time by cooling the inside of the chamber of the furnace, which constitutes a cooling zone, with air. CONSTITUTION:The cooling zone of a blackened film forming furnace is constituted of three chambers 7, 8, 9 divided into three cooling zones while the peripheral walls of the furnace are provided with flow passages 10, 11, 12 permitting independent flows of cooling air. Respective zones of the chambers are cooled independently by the flow of the air whereby high-temperature shadow mask structural bodies 13, coming out of a heating zone, are transferred by a mesh-belt type conveyer 14 sequentially, then, the temperature of the bodies 13 becomes 100 deg.C and are carried out of the cooling zones. In this case, the opening degree of air flow rate regulating dampers 27, 28, 29 as well as the rotation of a motor for an air discharging device 23 are controlled in accordance with the outputs of temperature sensors 24, 25, 26 provided in respective chambers 7, 8, 9 whereby the amount of discharging air may be regulated and the temperatures of the cooling zones in respective chambers 7, 8, 9 may be controlled at a desired value.