radio frequency ion source (Radio Frequency lon source)

摘要

the air in the atmospheric pressure from the power supply to the scope of the rf ionization source, and one or more cathode (1) and the anode have discharge electrode etc.. each cathode (1) is associated with the coupling means (4). rf signal light supply device (8), with the combination of the cathode (2) of the plasma discharge of the discharge can happen. this can happen, the whole area of the cathode. the large surface area is provided. in order to properly. in the method, the cathode (2) of the plasma discharge is the best area to accept, but also more than a metaphor for great area, not in the plasma. the work is the loss of the stability of the discharge ion source of the improvement..the discharge is up to the anode and cathode of each region (in) 5mm above do not fall down, but also can form the electrode with high surface formed so that, when the source is in the gap between the electrode of the distorted electric field is high, has been created by even in a very low air pressure input to the effective discharge of the power supply may be given.