RAW MATERIAL VAPORIZER FOR ELECTROCHEMICAL VAPOR-DEPOSITION, ELECTROCHEMICAL VAPOR DEPOSITION DEVICE AND SOLID ELECTROLYTIC FILM FORMING METHOD USING THE DEVICE

摘要

PROBLEM TO BE SOLVED: To obtain a solid electrolyte of high performance by perfectly vaporizing solid electrolytic raw material powder and subjecting it to electrochimical vapor deposition. SOLUTION: A raw material vaporizer 8 is fed with raw material powder 1 from raw material feeding parts 2 and 4, where the raw material powder 1 is brough to contact with the surfaces of many spheres heated to a high temp. by a heater 7 and are perfectly vaporized, and this raw material vapor 25 is fed to a reaction furnace chamber through a mixer 10 from a raw material vapor exhausting part 6. In a reaction chamber 21, the raw material vapor 25 is introduced into the inside of a vapor-depositing substrate 23 through a raw material vapor feeding tube, and electrochemical deposition is practiced to form a solid electrolytic film 28.