CARBON ELECTRODE FOR GENERATING FLUORINE GAS OR NITROGEN TRIFLUORIDE GAS AND DEVICE FOR GENERATING FLUORINE GAS OR NITROGEN TRIFLUORIDE GAS USING THE ELECTRODE

摘要

PROBLEM TO BE SOLVED: To provide a carbon electrode for manufacturing high-purity F2 or NF3 having a low content of CF4 and supply the F2 or NF3 on-site and a device for generating the high-purity F2 or NF3 using the electrode as a first purpose and to furnish a carbon electrode for suppressing the polarization due to an anode effect in electrolysis and generating the F2 or NF3 to be stably supplied on-site and a device for generating high-purity F2 or NF3 using the electrode. ;SOLUTION: A carbonaceous material high in bonding strength between the carbon particles and with the bonding strength measured at ≥0.2 (g/mm3) by the ACT-JP method is used as the carbon electrode for generating high-purity F2 or NF3 to suppress the generation of CF4. Further, a metal fluoride is added to the carbonaceous material to increase the bonding strength between carbon particles, and the polarization due to anodization is controlled.;COPYRIGHT: (C)2001,JPO