Members for mask production, masks, and methods thereof for manufacturing same

摘要

Substrates are disclosed for forming a microlithographic mask having a thin membrane. Also disclosed are masks formed from such substrates. The masks preferably include a support member to support the membrane, the membrane defining the mask pattern. The support member can be configured as a network of supporting struts fused to a mask membrane. The mask membrane preferably includes a thin crystalline layer (e.g., silicon) containing an impurity (dopant). Each atom of the impurity has an atomic radius that is smaller than the atomic radius of atoms of the crystalline material. Also disclosed are methods for manufacturing such substrates and masks.