METHOD FOR PRODUCING HIGHLY PURE amp;beta;-DIKETONATE COMPLEX OF ALKALINE-EARTH METAL AND HIGHLY PURE amp;beta;-DIKETONATE COMPLEX FOR FORMING THIN FILM BY CHEMICAL VAPOR DEPOSITION METHOD

摘要

PROBLEM TO BE SOLVED: To produce a highly pure β-diketonate complex of an alkaline-earth metal useful as a raw material for forming thin layers by CVD (chemical vapor deposition) method.;SOLUTION: The method for producing the highly pure β-diketonate complex of the alkaline-earth metal is to mix an acetone solution of DPM (dipivaloylmethane) with an acetone solution of BaCl₂, drop a methanol solution of NaOH under sufficient agitation and react DPM with Ba. Highly pure Ba(DPM)₂ containing 0.01% evaporation of impurities and ≥99.5% evaporation of chelates detected by thermogravimetric analysis in vacuum as shown in figure 1 (C), and having 99.1-101.0% carbon content based on the theoretical value, 99.0-101.0% hydrogen content based on the theoretical value measured by elementary analysis and 99.0-101.0% metal content based on the theoretical value detected by ICP (Inductively-Coupled Plasmaspectrometer) analysis is obtained.;COPYRIGHT: (C)2004,JPO