Submerged plasma generator, method of generating plasma in liquid and method of decomposing toxic substance with plasma in liquid

摘要

A submerged plasma generator comprising bubble forming means for forming bubbles in a liquid and an electro-magnetic wave generator for radiating electromagnetic waves in a liquid, wherein plasma is generated by, while forming bubbles in a liquid, irradiating the bubbles with electromagnetic waves so that plasma which has high energy but is macroscopically of low temperature and which is safe and is easy to handle can be realized. The submerged plasma generator can be used in, for example, the formation of a film on a substrate and the decomposition of toxic substances such as dioxin.