SAPPHIRE SUBSTRATE FOR SUPERCONDUCTIVE MICROWAVE DEVICE

摘要

PROBLEM TO BE SOLVED: To improve the yield of a superconductive microwave device by simplifying management of a direction presenting a specific dielectric constant of a substrate.;SOLUTION: A dielectric constant in the direction of an arrow A of an R-face sapphire substrate 1 is designated to be ε1, and a dielectric constant in the direction of an arrow B vertical to this is designated to be ε2. With both of the ends of one specific side of the R-face sapphire substrate 1 respectively as reference points, marks 2a and 2b are given, and the side 3 is designated to be a reference side. Thus, a direction parallel to the reference side 3 becomes the direction of the arrow B of the dielectric constant ε2, and a direction vertical to the reference side 3 becomes the direction of the arrow A of the dielectric constant ε1. In the case of preparing a prescribed superconductive microwave device on the R-face sapphire substrate 1, a forming direction of the superconductive microwave device can be decided based on the reference side 3, so that this device can be formed constantly in the same direction of the arrow A or B on each R-face sapphire substrate 1.;COPYRIGHT: (C)2006,JPO&NCIPI