TRACE IMPURITY ANALYZER AND TRACE IMPURITY ANALYSIS METHOD

摘要

PROBLEM TO BE SOLVED: To provide a trace impurity analyzer and a trace impurity analysis method capable of measuring a trace impurity in sample gas in real time, and analyzing plural kinds of sample gases by short-period switching.;SOLUTION: This trace impurity analyzer for detecting an impurity component included in the plural kinds of sample gases relative to each sample gas includes a plurality of feeding routes for feeding the sample gas arranged in parallel relative to each sample, an introduction route where the plurality of feeding routes join together, and one or two or more gas analysis means connected to the introduction route. In the analyzer, each of the plurality of feeding routes is provided with at least two on-off valves and a depressurizing means for depressurizing the route between the two on-off valves, and two or more kinds of sample gases are introduced successively into one gas analysis means by switching the kind of the sample gas to be introduced into the gas analysis means.;COPYRIGHT: (C)2007,JPO&INPIT