TRANSFER MASK FOR LOADING HETEROGENEOUS KINDS OF BALLS

摘要

PROBLEM TO BE SOLVED: To provide a mask loading heterogeneous kinds of minute balls on a section to be loaded such as an electrode for a body to be loaded, such as wafer, substrate or the like with high reliability and accuracy, while receiving no heat load.;SOLUTION: The transfer mask is used for No.2 and subsequent loading works for successively loading different kinds of balls at the specified places of the body to be loaded. The transfer mask has transfer holes for transferring the balls to be loaded, and escaping holes for letting the previously loaded balls escape. The escaping holes are formed to each of the previously loaded balls, and the side-face shapes are formed in a conical shape so that diameters become smaller, as going toward upper sections. In the transfer mask, it is preferable that the upper sections of the escaping holes be closed. More preferably, the tapered angle of the escaping holes be further larger than those of the transfer holes, when the side-face shapes of the transfer holes are formed into conical shapes.;COPYRIGHT: (C)2008,JPO&INPIT