METHOD FOR PREPARING SILICON ON SAPPHIRE THIN FILM AND THE SILICON ON SAPPHIRE THIN FILM PREPARED BY THE SAME TO PREVENT LATTICE MISMATCH

摘要

PURPOSE: A method for preparing silicon on sapphire thin film and the silicon on sapphire thin film prepared by the same are provided to improve the interfacial property between the silicon layer and a sapphire.;CONSTITUTION: The method of manufacturing the silicon laminate sapphire thin film is provided. The silicon layer(210) is laminated on the sapphire substrate(200). A cation is injected into the silicon layer and then the amorphous layer is formed in the interface of the silicon layer and sapphire substrate. The amorphous layer is recrystallized by heat-treatment.;COPYRIGHT KIPO 2010