首页> 外国专利> Method for producing multi-gate field-effect transistor with fin structure having drain-extended MOS field-effect transistor

Method for producing multi-gate field-effect transistor with fin structure having drain-extended MOS field-effect transistor

机译:具有漏极扩展的MOS场效应晶体管的鳍片结构的多栅场效应晶体管的制造方法

摘要

In a method for producing an electronic component, a first doped connection region and a second doped connection region are formed on or above a substrate; a body region is formed between the first doped connection region and the second doped connection region; at least two gate regions separate from one another are formed on or above the body region; at least one partial region of the body region is doped by means of introducing dopant atoms, wherein the dopant atoms are introduced into the at least one partial region of the body region through at least one intermediate region formed between the at least two separate gate regions.
机译:在电子部件的制造方法中,在基板上或上方形成第一掺杂连接区域和第二掺杂连接区域。在第一掺杂连接区和第二掺杂连接区之间形成主体区。在主体区域上或主体区域上方形成至少两个彼此分离的栅极区域。体区的至少一个部分区域通过引入掺杂剂原子被掺杂,其中掺杂剂原子通过在至少两个分开的栅极区之间形成的至少一个中间区域被引入到体区的至少一个部分区域中。 。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号