INTERFACE FOR WAFER TEST CAPABLE OF SAVING A SPACE OF AN INSPECTION OFFICE, AND A WAFER INSPECTOR

摘要

PURPOSE: Interface for wafer test and a wafer inspector are provided to realize space saving and low costs of an inspection office by separating an alignment device from the inspection office and using the inspection office as an inspection private space.;CONSTITUTION: A probe card(19) comprises a plurality of probes(19A) which are electrically connected to an electrode of a wafer. An adsorption mean(20) adsorbs the wafer in the probe card. The adsorption mean comprises a first vent(23A) installed at a probe card main body(19B). A seal member(21) for wafer adsorption forms a sealing space in an interval with the probe card main body. A fixing ring(23) fixes the seal member for the wafer adsorption on a card holder of the probe card.;COPYRIGHT KIPO 2012