WATER-COOLED TUBE FOR COOLING A SILICON SINGLE CRYSTAL INGOT CAPABLE OF IMPROVING THE GROWTH SPEED OF THE INGOT PER HOUR AND A SILICON SINGLE CRYSTAL GROWTH DEVICE INCLUDING THE SAME

摘要

PURPOSE: A water-cooled tube for cooling a silicon single crystal ingot and a silicon single crystal growth device including the same improve the cooling speed of the silicon single crystal ingot by effectively absorbing radiation heat discharged from the ingot when the silicon single crystal grows.;CONSTITUTION: A water-cooled tube (140) cools a silicon single crystal ingot growing in a silicon solution. The water-cooled tube includes a water-cooled body (141) and an aluminum-nitride coating layer (143). Cooling water circulates inside the water-cooled tube body to cool the silicon single crystal ingot. The water-cooled tube body is composed of an inner tube (141a) and an outer tube (141b). A cooling water inlet (142a) and a cooling water outlet (142b) are formed on one side and the other side of the water-cooled tube body, respectively. The aluminum-nitride coating layer absorbs radiation heat discharged from the ingot when the silicon single crystal ingot grows.;COPYRIGHT KIPO 2013