Etching solution of titanium-based metals, tungsten-based metals, titanium tungsten-based metals or their nitrides

摘要

Containing hydrogen peroxide water, and organic acid salts, it is etchant titanium-based metals, tungsten-based metals and their nitrides, or titanium-tungsten-based metals. By using this, a uniform etching of titanium-based metal with reduced foaming, tungsten-based metals, of their nitrides or titanium-tungsten-based metals are possible, titanium-based metals, tungsten-based metals, titanium tungsten-based metals I obtained an etching solution with excellent selective etching properties to the substrate material or other metals.