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LOW MICROPIPE 100 MM SILICON CARBIDE WAFER
LOW MICROPIPE 100 MM SILICON CARBIDE WAFER
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机译:低微管100毫米碳化硅晶片
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摘要
A high quality single crystal wafer of SiC is disclosed having a diameter of at least about 100 mm and a micropipe density of less than about 25 cm−2.
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