Method for manufacturing PMMA shadow mask, PMMA shadow mask, and method for forming metal pattern by use of PMMA shadow mask

摘要

The present invention is to provide a method for manufacturing a PMMA shadow mask, a PMMA shadow mask, and a method for forming a metal pattern by using PMMA shadow mask. For the method for manufacturing the PMMA shadow mask capable of forming a fixed pattern on a substrate, the PMMA shadow mask, and the method for forming the metal pattern by using PMMA shadow mask, a Poly(methyl methacrylate (PMMA) layer is formed on a base substrate. A through pattern is formed in the PMMA layer. The PMMA layer is separated from the base substrate.