METHOD OF ACQUIRING LIGHT SPOT CENTROID IN OPTICAL WAVEFRONT SENSOR, OPTICAL WAVEFRONT MEASUREMENT METHOD AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To accurately calculate a centroid position of a light spot formed by each microlens in an optical wavefront sensor.SOLUTION: A light spot centroid position acquisition method acquires a centroid position of each light spot on a photodetector 2 in an optical wavefront sensor 3 which comprises a plurality of microlenses 1a and the photodetector 2 for receiving light spots formed by respective microlenses and is used for measurement of a wavefront of light. The method includes a first step of estimating a position of a third light spot formed by a third microlens C by using known centroid positions of first and second light spots a and b formed respectively by first and second microlenses A and B, a second step of setting a calculation object region of a centroid position c of the third light spot by using the estimated position of the third light spot, and a third step of calculating the centroid position of the third light spot in the calculation object region.SELECTED DRAWING: Figure 3