LIGHT SPOT CENTROID POSITION ACQUISITION METHOD FOR WAVEFRONT SENSOR, WAVEFRONT MEASUREMENT METHOD, WAVEFRONT MEASUREMENT APPARATUS AND STORAGE MEDIUM STORING LIGHT SPOT CENTROID POSITION ACQUISITION PROGRAM

摘要

The method enables acquiring centroid positions of light spots formed on an optical detector by multiple microlenses arranged mutually coplanarly in a wavefront sensor. The method includes a first step of estimating, by using known centroid positions or known intensity peak positions of first and second light spots respectively formed by first and second microlenses in the multiple microlenses, a position of a third light spot formed by a third microlens, a second step of setting, by using the estimated position of the third light spot, a calculation target area for a centroid position of the third light spot on the optical detector, and a third step of calculating the centroid position of the third light spot in the calculation target area.