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Resonator device including electrodes with buried temperature compensating layers
Resonator device including electrodes with buried temperature compensating layers
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机译:包括具有埋入的温度补偿层的电极的谐振器装置
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摘要
An acoustic resonator includes a substrate and a first composite electrode disposed over the substrate. The first composite electrode includes first and second electrically conductive layers and a first temperature compensating layer disposed between the first and second electrically conductive layers. The second electrically conductive layer forms a first electrical contact with the first electrically conductive layer on at least one side of the first temperature compensating layer, and the first electrical contact electrically shorts a first capacitive component of the first temperature compensating layer.
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